Lam Research launches collaborative robots to optimize critical maintenance in chip factories
venturebeatChip equipment maker Lam Research introduced Dextro, the chip industry’s first collaborative robot (cobot) designed to optimize critical maintenance tasks in chip factories.
The robots have been deployed in multiple advanced wafer fabs around the world. Dextro enables accurate, high-precision maintenance to minimize tool downtime and production variability. It drives significant first-time-right (FTR) results that can enhance yield in wafer fabrication plants.
If successful, the robots could make semiconductor manufacturing — which is the foundation for billions upon billions of revenues in the electronics industry — a lot more efficient.
Today’s wafer fabrication equipment utilizes advanced physics, robotics and chemistry to create semiconductors at nanoscale. A typical fab has hundreds of process tools that each require regular, complex maintenance.
Dextro is designed to improve the cost effectiveness of this equipment by performing critical maintenance tasks repeatability with sub-micron precision.
“Dextro is an exciting leap forward in semiconductor manufacturing equipment maintenance ...
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