ASML spinout Invisix raises €20M to see inside the chips optics can’t

https://media.thenextweb.com/2026/05/Invisix.avif

Modern chips have a measurement problem that sounds almost philosophical: they have become too complex to look at.

As logic and memory devices stack into three dimensions and shrink to a few nanometres, the optical tools that check each layer can no longer resolve the structures buried inside.

Invisix, an Eindhoven startup spun out of ASML, has raised €20 million to fix that blind spot.

The oversubscribed seed round drew Hitachi Ventures, Transition Ventures, imec.xpand, Doosan Investment Co. and, in the company’s phrasing, a tier-1 semiconductor manufacturer.

That last, anonymous backer is a meaningful signal in a field where chipmakers rarely invest in tools they do not expect to use; earlier reporting has pointed to Samsung taking a stake in the company as it works on yields for its 2nm process. Invisix will use the money to grow its team, build its first shippable system, and run customer demonstrations from...

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